SemiTeq
 
   
    UHV VAKUM TEKNOLOJİLERİ

 

 

AsResearch
Slaughter
AsPower
Extech
Agilent-Vakum
Agilent-Leak
Nolek
AMP
SemiTeq
Maccor
STS
Zensol
Kingsine
Leaptronix
KEY
Mostek

 

 

  

 
 Field of activity
«Semiconductor Technologies and Equipment» JSC is a highly professional company in a field of development and manufacturing of ultra high vacuum equipment for R&D and pilot production for nanotechnology and nanoelectronics and semiconductor micro- and optoelectronics.

SemiTEq® is the registered trade mark of the company.
SemiTEq engaged in design and development of molecular beam epitaxy systems based on its own extended MBE growth technological practice and planar technological eqiupment.

Mission
The Mission of SemiTEq is to provide its customers with modern and reliable equipment to ensure their fast start-up.
    To serve the Mission following development policy is adopted:
  • From technology vision to equipment powers
  • Technology judges design.
    To follow the policy it means that:
     
  • Technology and material peculiarity considerations lead to equipment specification;
  • Extended growth practice with a pilot machine precedes the product marketing;
  • To prove the design special technological experiments are being scheduled;
  • To ensure our customer fast start-up SemiTEq is ready to provide him with technological know-how.
As a result:
  • All the design decisions are verified against technology practice;
  • Both equipment and technology are being shipped to customer to ensure his modern technological level in a shortest time.
 

 History
«Semiconductor Technologies and Equipment» JSC was founded in April of 2001. MBE machines development had started from upgrading of EP1203, the MBE machine designed by USSR Academy of Science in 1987 and manufactured up to 1992. Technical specification for upgrading followed years of experience in GaAs/AlGaAs superlattices growth for optoelectronics.

5 from 13 machines manufactured have been upgraded. One of upgraded machines in 2003 has been installed to Nanotechnology Center of Toronto University, Canada, and is still in operation now.

 

In 2002 resulting commercial contract fulfillment specification for group III nitrides MBE machine have emergedfollowing in 2003 by development and installation of EPN3. While developing the machine all the nitrides MBE growth peculiarities and modern equipment design trends have been considered.

Results on group III nitrides MBE grown heterostructers for RF application obtained with EPN3 showed that this machine could be a prototype for the series of group III nitrides MBE machines to be developed.

 

In 2006 next generation of MBE system – an STE family – development has been finished.
The leading machine — STE3N3 intended for group III nitrides growing has successfully passed final acceptance test.
This initiated the serial production of these systems.

SemiTEq MBE assembling hall       

 

 

 

 

 

 

 

Molecular Beam Epitaxy systems Wafer Processing HV Equipment Components

Molecular Beam Epitaxy Systems


The adopted development policy based on own technological experience leads to the best design to provide the widest of possible technology settings width.
Participating in national research projects in a field of semiconductor material science and equipment development is keeping the company in line with modern technology trends.

Basing on the own technological practice the best decisions among bounded up and cross influenced design and technology factors are made leading to providing the technologist with the freedom of technology settings to choose.
The installation procedure for all the systems of SemiTEq brand includes prespecified growth technology transfer, and it is a criterion for the system acceptance.

STE3N3

MBE system for group III nitrides growth

 

STE3532

MBE system for III - V / II - VI conventional compounds.

 

STE3532

MBE system for III - V / II - VI conventional compounds.
STE3526

MBE complex for hybrid III-V and II-VI semiconductor heterostructures

 

 

STE EB series

Electron Beam Evaporation systems
Evaporation of thin film multilayer under controlled HV and UHV conditions

 

STE RIE, STE ICPe, STE ICPd series

Plasma Etching and Plasma Enchanced Deposition systems
Wide range of plasma-assisted etching or deposition processes

STE RTA series

Rapid Thermal Annealing systems
Systems for rapid annealing of semiconductor wafers in coltrolled gas environment

 

 

 

 

 

 

 

 

  1. Effusion molecular sources

  2. Linear manipulators

  3. Shutters control system

  4. Substrate holders

  5. Substrate heating units

  6. Customer specified UHV chambers and cryopannels

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

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İNTERELEKTRO İnternet ve Elektronik Teknolojileri San. Tic. Ltd. Şti.

Ankara Teknoloji Geliştirme Bölgesi, Cyberpark Vakıf Binası

5.Cad. No:4/202 Bilkent 06800  Ankara - Türkiye

Tel: 0312 285 2500   Fax: 0312 266 2565

email: info@interelektro.com

     

AsResearch | Slaughter | AsPower | Extech | Agilent-Vakum | Agilent-Leak | Nolek | AMP | SemiTeq | Maccor | STS | Zensol | Kingsine | Leaptronix | KEY | Mostek

Bu sitenin son güncelleştirilme tarihi 26/08/11