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ASI tarafından üretilmekte olan Residual
Gas Analyser'lara ilişkin bilgiler aşağıda
verilmektedir.
Her
türlü detay bilgi ve talebiniz için bizlerle
temasa geçmenizi rica ederiz.
ASI Complete
Catalog :
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The AX-80 mass spectrometer system
can be configured to meet most Residual
gas analysis and process monitoring
applications. With mass ranges of 80amu
and a choice of detector systems the AX-80
may be supplied as an "add on" to an
existing vacuum system or as a complete
stand alone unit with integrated vacuum
and inlet system. The AX-80 uses a PC
Computer as its system controller and
its operating software is written in a
high level language. This simplifies
updating, and allows easy customising to
meet specific process requirements. The
user-friendly software operating under
'Windows' make the AX-80 easy to use in
all RGA and gas analysis applications.
Key Benefits
 |
Low
Cost |
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Small Size |
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Simple to use |
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Comprehensive Software. |
Complete RGA.
|
The Analyser.>
The quadrupole analyser is
available with a choice of ion
sources, mass filters and
detection systems. The standard
ion source is a radially
symmetrical design fitted with
twin filaments and suits most
applications. The standard
filaments are tungsten but
thoria coated iridium are
available if required. |
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This compact unit contains
the complete quadrupole
electronics and plugs directly
onto the analyser. Communication
with the PC Computer is via the
RS232.
The unit has a performance and
features only found on more
expensive RGA's, and yet its
small size and low cost is
achieved by the use of the very
latest electronic techniques. |
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Software features
The new 'Windows' RGA
software for the AX-80 mass
spectrometer has been designed
to be 'user friendly' and very
simple to learn and use. For
detailed information refer to
the separate software
leaflet. |
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Technical Data. |
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Mass Range |
1-80 |
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Resolution |
10% valley between equal peaks. |
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Minimum detectable partial
pressure |
1x10-10mBar Faraday, |
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Minimum detectable total
pressure |
5 x 10-11 mBar. |
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Maximum operating pressure |
1x10-2mBar Faraday, |
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Electron energy |
80eV |
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Ion Energy |
6eV |
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Emission |
100 uA * |
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Bake-out temperature |
250C recommended. 350C maximum |
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R.F frequency |
1.84Mhz std.(options 1.6Mhz -
4.9Mhz) |
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R.F. amplitude |
800V p/p at maximum mass |
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Rod diameter |
3.0 m.m. |
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Rod length |
20 m.m. |
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Power requirements |
17-26VDC 15Watt |
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Software specification |
Refer to
separate Software
Leaflet. |
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P.C .Computer required. |
Pentium preferred. |
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Order Information. - AX-80. |
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Complete Instruments |
AX-80/80F |
80amu RGA with Faraday Detector |
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Spare Analyzer Heads |
AH80F |
80amu Analyzer with Faraday
Detector |
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Spare Filaments |
SM100FT |
Pack of 2 Thoria coated Iridium |
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Dimensions
Electronics unit 6 x 3 x 3.5
inches (152 x 76 x 88mm) |
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The AX-200 mass spectrometer system
can be configured to meet most gas
analysis and process monitoring
applications. With mass ranges up to
200amu and a choice of detector systems
the AX-200 may be supplied as an "add
on" to an existing vacuum system or as a
complete stand alone unit with
integrated vacuum and inlet system. The
AX-200 uses a PC Computer as its system
controller and its operating software is
written in a high level language. This
simplifies updating, and allows easy
customising to meet specific process
requirements. The user-friendly software
operating under 'Windows' make the
AX-200 easy to use in all RGA and gas
analysis applications.
Key Benefits
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Low
Cost |
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Very Small and light weight. |
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Very Low power requirements. |
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Simple to use |
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Comprehensive Software. |
Complete RGA.
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The Analyser.>
The quadrupole analyser is
available with a choice of ion
sources, mass filters and
detection systems. The standard
ion source is a radially
symmetrical design fitted with
twin filaments and suits most
applications. The standard
filaments are tungsten but
thoria coated iridium are
available if required. |
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This compact unit contains
the complete quadrupole
electronics and plugs directly
onto the analyser. Communication
with the PC Computer is via the
RS232.
The unit has a performance and
features only found on more
expensive RGA's, and yet its
small size and low cost is
achieved by the use of the very
latest electronic techniques. |
|
Software features
The new 'Windows' RGA
software for the AX-200 mass
spectrometer has been designed
to be 'user friendly' and very
simple to learn and use. For
detailed information refer to
the separate software
leaflet. |
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Technical Data. |
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Mass Range |
1-100 or 1-200 std. (Lower mass
options available) |
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Resolution |
10% valley between equal peaks. |
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Minimum detectable partial
pressure |
2x10-11mBar Faraday,
5x10-14mBar SEM |
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Minimum detectable total
pressure |
1 x 10-11 mBar. |
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Maximum operating pressure |
1x10-4mBar Faraday,
1x10-5mBar SEM |
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Electron energy |
70eV |
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Ion Energy |
6eV |
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Emission |
1 mA * |
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Bake-out temperature |
250C recommended. 350C maximum |
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R.F frequency |
1.84Mhz std.(options 1.6Mhz -
4.9Mhz) |
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R.F. amplitude |
800V p/p at maximum mass |
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Rod diameter |
6.35 m.m. |
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Rod length |
100 m.m. std. |
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Power requirements |
17-26VDC 15Watt |
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Software specification |
Refer to
separate Software
Leaflet. |
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P.C .Computer required. |
486/66 minimum. Pentium
preferred. |
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Order Information. - AX-200. |
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Complete Instruments |
AX-200/100F |
100amu RGA with Faraday Detector |
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AX-200/100M |
100amu RGA with Dual Detector |
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AX-200M |
200amu RGA with Dual Detector |
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Spare Analyzer Heads |
AH200F |
100/200 Analyzer with Faraday
Detector |
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AH200M |
100/200 Analyzer with dual
detector |
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Spare Filaments |
AX100FW |
Pack of 4 tungsten |
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SM100FT |
Pack of 2 Thoria coated Iridium |
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Dimensions
Electronics unit 6 x 3 x 3.5
inches (152 x 76 x 88mm) |
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The AX-600 Residual
Gas Analyser
The AX-600 mass spectrometer system
can be configured to meet most gas
analysis and process monitoring
applications. With mass ranges up to
300amu and a choice of detector systems
the AX-600 may be supplied as an "add
on" to an existing vacuum system or as a
complete stand alone unit with
integrated vacuum and inlet system. The
AX-600 uses a PC Computer as its system
controller and its operating software is
written in a high level language. This
simplifies updating, and allows easy
customising to meet specific process
requirements. The user-friendly software
operating under 'Windows' make the
AX-600 easy to use in all RGA and gas
analysis applications.
Key Benefits
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Additional facilities. |
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Very Compact and lightweight RGA |
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Low
power requirement. |
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Comprehensive Software. |
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Twin Filament. |
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The Analyser. >
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The
quadrupole analyser is available
with a choice of ion sources,
mass filters and detection
systems.
The standard ion source is a
radially symmetrical design
fitted with twin filaments and
suits most applications. The
standard filaments are tungsten
but thoria coated iridium are
available if required.
The standard mass filter is
fitted with 6.35mm diameter
cylindrical rods.
The detector is a combined
Faraday cup and Channeltron
detector. A Faraday detector
only is available if required
for the lower mass range units. |
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This compact unit contains the
complete quadrupole electronics
and plugs directly onto the
analyser. Communication with the
PC Computer is via the RS232.
The unit has a performance and
features only found on more
expensive RGA’s, and yet its
small size and low cost is
achieved by the use of the very
latest electronic techniques.
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Technical Data. |
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Mass Range Options |
1-100, 1-200, 1-300 (Others
available) |
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Resolution |
10% valley between equal peaks. |
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Minimum detectable partial
pressure |
2x10-11mBar Faraday,
5x10-14mBar SEM |
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Minimum detectable total
pressure |
1 x 10-11 mBar. |
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Maximum operating pressure |
1x10-4mBar Faraday,
1x10-5mBar SEM |
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Electron energy |
10 - 120eV |
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Ion Energy |
1-20eV |
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Emission |
20uA - 2 mA * |
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Bake-out temperature |
250C recommended. 350C maximum |
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R.F frequency |
1.84Mhz std.(options 1.6Mhz -
4.9Mhz) |
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R.F. amplitude |
1200V p/p at maximum mass |
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Rod diameter |
6.35 m.m. |
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Rod length |
100 m.m.
std. (125
mm above 200amu.) |
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Power requirements |
17-26VDC 15-25 Watt |
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Software specification |
Refer to
separate Software
Leaflet. |
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P.C .Computer required. |
Pentium preferred. |
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Ion
Source Options. |
Open, Axial Beam, Cross Beam. |
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Baud Rate |
600 to 56,600 |
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Order Information. - AX-600. |
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Complete Instruments |
AX-600/100F |
100amu RGA with Faraday Detector |
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AX-600/100M |
100amu RGA with Dual Detector |
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AX-600/200M |
200amu RGA with Dual Detector |
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AX-600/300M |
300amu RGA with Dual Detector |
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Spare Analyzer Heads |
AH200F |
100/200amu Analyzer with Faraday
Detector |
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AH200M |
100/200amu Analyzer with dual
detector |
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AH300M |
300amu Analyzer with dual
detector |
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Spare Filaments |
AX100FW |
Pack of 4 tungsten |
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SM100FT |
Pack of 2 Thoria coated Iridium |

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The AX800
Residual Gas Analyser.
The
AX800 Series of computer integrated mass
spectrometer systems can be configured
to meet most gas analysis and process
monitoring applications. With mass
ranges up to 600 amu and a choice of
detection systems the AX800 may be
supplied as an "add-on" to an existing
vacuum system or as a complete stand
alone unit with integrated vacuum and
inlet systems. The AX800 uses a PC
computer as its system controller and
its software is written in a high level
language to simplify updating and to
make it easier for customizing to meet
specific process requirements. Color
display and the flexibility offered by
keyboard and mouse control of menu
selection make the AX800 easy to use in
all RGA and gas analysis application
Key Benefits
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High Precision |
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Wide choice of Mass ranges |
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Fast Scanning. |
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Easy maintenance. |
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The AX800 Standard
Analyser |
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The quadrupole analyser is
available with a choice of ion
sources, Mass filters and
detection systems.
The
Ion Source.
The standard ion source is a
radial symmetrical design with
twin filaments. The semi-open
construction makes it suitable
for most applications. Thoria
coated filaments to minimize
out gassing are available as an
option.
The Mass Filter.
The standard mass filter is a
125mm long single filter with
6mm diameter cylindrical rods. A
Triple filter version is
available (See Modular Analyser
below)
The Detector.
Choices of either Faraday only
or dual Faraday/multiplier
detectors are available.
The Mounting Flange.
Normally CF63 or ISO63 flange is
fitted. The quadrupole assembly
can be mounted on larger flanges
if required. |
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The AX800 Modular Analyser
(Option) |
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Analysis of low volatile
samples and condensable vapours
may result in contamination of
the analyser. This Analyser had
been developed for quick removal
and replacement of both the ion
source and mass filter greatly
simplifying cleaning and
maintenance. If a spare ion
source and mass filter are
available then this simple
procedure greatly reduces down
time of the quadrupole system.

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The Ion Source.
The Ion Source
simply plugs into the top of the
mass filter housing without
the need to make electrical
connections and
therefore can be quickly
changed.
The standard ion source is a
radial symmetrical design with
twin filaments.
The Ion Source illustrated above
is fitted with an axial gas
inlet probe, twin filaments,
source heater and temperature
sensor. A radial aperture is
provided for molecular beams,
or use of solids probe. The
semi-open construction makes it
suitable for most applications.
Thoria coated filaments to
minimize out gassing are
available as an option.
Refer to the options page for
additional Ion sources that are
available.
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The Mass Filter.
The mass filter plugs in to the
housing without the need to make
electrical connections and
therefore can also be quickly
changed. This is particularly
useful for the triple filter
version . The standard mass
filter is a 150 mm long single
filter with 6mm diameter
cylindrical rods. A Triple
filter version is available.
The Detector.
Choices of either Faraday only
or dual Faraday/multiplier
detectors are available. The
electron multiplier can be
either Channeltron or discreet
dynode type for continuous high
output current monitoring.
The Mounting Flange.
Normally CF63 or ISO63 flange is
fitted. The quadrupole assembly
can be mounted on larger flanges
if required.
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The RF Head
This compact unit contains the
pre-amplifier and RF
generation/control circuitry and
plugs directly onto the analyzer
to prevent signal degradation.
Choices of operating frequencies
are available to give the best
possible performance over the
required mass range. The
standard cable length is 2
metres but longer cables can
be supplied if required.
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The Control Unit.
The Control unit contains all
the main power supplies for the
instrument including the
emission and filament control
circuits and the Computer
Interface Card that are housed
in a 2U high 19inch rack module.
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Technical Data. |
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Mass Range |
1-50,1-100,1-200,2-300. (Other
option available) |
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Resolution |
<10% valley between equal peaks. |
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Minimum detectable partial
pressure |
2x10-11mBar Faraday,
1x10-14mBar SEM |
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Minimum detectable total
pressure |
1 x 10-11 mBar. (If Fitted) |
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Maximum operating pressure |
1x10-4mBar Faraday,
1x10-5mBar SEM |
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Electron energy |
10-100eV |
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Ion
Energy |
2-20eV |
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Emission |
100uA to 2mA * |
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Bake-out temperature |
250C recommended. 350C maximum |
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R.F frequency |
2.4 Mhz std. (options 1.2Mhz -
4.9Mhz) |
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R.F. amplitude |
1350V p/p at maximum mass |
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Rod diameter |
6.0 m.m. |
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Rod
length |
125
m.m. std. (175 m.m. for Triple
filter) |
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Power requirements |
105/115/220/240 volts 50/60Hz
80Watt |
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Software specification |
Refer to separate Software
Leaflet. |
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P.C .Computer required. |
Pentium preferred. |
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Order
Information. - Standard AX800. |
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Complete Instruments |
AX800/100F |
100amu RGA with Faraday Detector |
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AX800/100M |
100amu RGA with Dual Detector |
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AX800/200M |
200amu RGA with Dual Detector |
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AX800/300M |
300amu RGA with Dual Detector |
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Spare Analyzer Heads |
AX800/200F |
100/200 Analyzer with Faraday
Detector |
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AX800/200M |
100/200 Analyzer with dual
detector |
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AX800/300M |
Analyzer with dual detector for
300amu. |
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Spare Filaments |
AX800/FW |
Pack of 4 tungsten |
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AX800/FT |
Pack of 2 Thoria coated Iridium |
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Quadrupole
Operating Software.
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The
new 'Windows' software for the
Larimax mass spectrometers has
been designed to be 'user
friendly' quick to operate and
very simple to learn and use. |
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Main Display
Modes
Bar-Graph Mode
In Bar graph mode a region of
the mass spectrum is measured at
integral values of mass number
and the resulting partial
pressures are plotted against
mass number in a bar-graph
format. The first mass and scan
width of the display can be
quickley changed by the
adjustment of scroll bars and
the instrument gain range can be
quickly changed from the gain
display panel
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DATE/TIME is updated at the
start of each scan, and stored
if a spectra save is
implemented. |
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TOTAL ON/OFF
Select ON and Total Pressure
will be read and updated at the
end of each scan |
PRESSURE SCALE
Choice of mBar/Torr/Pascal |
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GAIN PANEL
UP/DOWN buttons increment the
gain
AUTO button selects auto gain |
FIRST MASS & SCAN WIDTH Scroll
bars. A simple and quick way to
set the start and finish masses
of the scan |
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Split Screen Library Search
Mode
In Split screen mode the
graphics area is divided into 2
parts. The lower part contains
the normal online spectra. The
Upper part displays the library
spectra and search panel. The
library contains common
residuals and semiconductor
gases. |
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Search Panel. Allows user input
of search mass and search type
with display of search results
and compound names. Buttons
enable scanning of found
spectra. |
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Stored Library Spectra displayed
on upper half of screen |
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Normal online Bar Graph Spectra
displayed on lower half of
screen |
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First Mass and Scan Width
controls are common to both
displays to maintain mass
alignment |
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Channel
Mode
The Channel and Trend modes are
identically operationally but
differ in the way that recorded
data is presented. In both cases
the mass spectrometer makes
measurements of partial pressure
at up to 16 mass numbers using
previously defined gain ranges
and detectors. |
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Channel Table. One Column for
each channel peak, and 5 rows
for peak data. To change the
data in either of the first 4
rows simply click on the data
that you wish to change. The box
will become highlighted and a
control will appear on the
Change Data panel above. Now
adjust the control to change the
data. |
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UP/Down buttons
to change the number of channels
being Scanned and displayed. Any
number between 1 and 16 can be
selected. |
Information/Message
Display box. |
Mass number being read by mass
spectrometer |
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Trend mode shows the same peak
information as channel mode
except the peak heights are
plotted against time. Therefore
all controls including the
Channel Grid Table will remain
the same in both modes. |
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Trend and Leak Detect |
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Analogue Display |
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This display option allows the
partial pressures of upto 16
masses to be plotted against
time. The plot interval can be
selected and each mass is
depicted as a different coloured
line. The leak detect mode is a
single channel version with the
default mass 4 selected for
helium. |
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This is mainly used for checking
on the analyser condition. It
allows the peak shape and
resolution of the analyser to be
monitored and also simplifies
the checking of mass alignment. |
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AUTO-RUN.
If Auto-Run has been selected
the display will change to a
table format. Filaments will
switch on automatically. There
will be a short delay whilst the
filaments out-gas total pressure
will be measured and then the
instrument will start scanning
over the first 100 amu. At the
end of a scan the software will
select the 8 largest peaks in
the spectrum and display these
in order on the table. The mass,
gas and percentage for each gas
will be indicated. The software
will continue to monitor these
major peaks, and comments will
appear giving vacuum diagnosis,
conditions, vacuum problems and
how the vacuum conditions are
changing. This auto-Run facility
is mainly for the system user,
who uses the RGA as a diagnostic
tool and problem solver. All by
the pressing of a single button.
At the bottom of this display
are 3 buttons. One which closes
this operating mode and returns
the user to the main display
modes, the second allows the
whole process to start again and
the third button takes the user
direct to leak detect mode. |
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TOP TOOL
BAR. (Drop
down Menus) Software control. |
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File menue
SAVE SETTINGS. Saves all the
current user settings into a
text file. These include first
mass Scan width, gain, channel
peak information, detector, etc.
LOAD SETTINGS. Loads all the
last saved setting information.
This is also automatically
loaded during boot-up of the
software, so the instruments
returns to the same condition,
and settings as it was when
switched off.
SAVE USER SETTINGS. Saves all
the current user settings into a
Named text file. Any number can
be saved. Useful for different
operators, or different
configurations of the Software.
LOAD USER SETTINGS. Loads all
the last saved setting
information from a Named user
settings file.
SAVE SPECTRA. Saves the current
spectra at the end of scan into
a text file along with all
instrument parameters and date
/time information.
RETRIEVE SPECTRA. Retrieves
spectra from file. The software
reconstructs and displays the
spectra and all instrument
settings at the time the spectra
was saved.
DATALOG. Saves Channel/Trend
Spectra data for up to 16 peaks
into a text file. This data can
be printed, displayed or
transferred to a spreadsheet for
further processing.
PRINT. Prints hard copy of the
current displayed spectra in
graphical form.
EXIT. Automatic shut down of
instrument and software. |
Display Mode menue
Selects one of the 5 main
operating modes. Bar Graph,
Analogue, Channel, Trend and
Leak Detect.
System menue.
Selection of set up menus for
changing serial port settings
and engineers panels for testing
hardware and configuring the
software to the hardware in use.
Options menue.
Allows leak mass to be changed,
mass calibration, and High
Pressure mode to be selected.
Scan menue.
Selects different fast scanning
options, and single shot/normal
scan mode.
Background Subtract.
Menu options to allow the
background spectra to be stored
and the later subtracted from
the current spectra after gas
has been admitted to the system.
Library Mode.
Allows Split Screen Mode to be
selected with a search facility
to display Library spectra above
the current spectra. (Bar-Graph
Mode only).
Help.
Provides online help with
descriptions of the main
software features and controls. |
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BOTTOM TOOL BAR Mass
Spectrometer Control. |
Status.
Displays current status of the
filament and emission, and will
display any warning messages
should the filament fail.
Filament Control Panel.
Allows filaments to be selected
ON/OFF with single button
operation.
Detector Control Panel.
FARADAY button. Selects Faraday
plate ion detector mode.
S.E.M. Button. Switches on the
high voltage to the Secondary
electron multiplier. (Dual
detector instruments only).
CAL. Button. Automatically
calibrates the electron
multiplier to a pre-set gain. A
Calibration panel indicates
progress and gain achieved at
completion. |
Scan Control Panel.
START button. Starts the
instrument mass scan. Either
from the first mass, first
channel, or last stop position.
STOP button. Stops the current
scan in its present mass/channel
position.
RESET button. Resets the mass
scan to first mass or channel 1,
in either start or stop mode.
Precision Code.
UP/DOWN buttons. Gives selection
of 8 precision codes. Higher
code number increases the number
of peak readings, integrations,
and therefore gives more
accurate and reproducible
results.
Peak Width.
Up/Down buttons. Changes the
amount of the peak that is
scanned. 0% represents a single
plotting point. 100% corresponds
to 16 plotting points. |
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Ion
Source Options.
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Open
Ion Source. (Fitted
as Standard) This ion source is
used for residual gas analysis
and simple gas analysis
applications. |
> |
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 |
< |
Axial
Beam Ion Source. This
ion source is specifically for
analysing either molecular beams
or ion beams from an external
source. The ion source has a low
profile with side mounted
filaments so that the source can
be positioned close to the exit
hole of a source of ions or
molecular beam that is in line
with the axis of the
quadrupole. |
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Cross
Beam Ion Source. This
source is for molecular beams
that enter the ion source at
right angles to the quadrupole.
A clear aperture of 3,5mm avoids
contact with the molecular beam.
This source is normally used in
applications where condensable
vapors may be present within the
molecular beam that could
contaminate the quadrupole
filter. |
> |
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< |
NIBTRON Ion Source. This
source is specially for gas
analysis only and has many
unique advantages to the
traditional gas tight Ion
Source. |
.Mass
Filter Options.
Single Mass
Filter. (Fitted
as Standard) A Low cost single stage
mass filter using cylindrical rods for
low mass applications.
Saddle mounted
Filter. A
high precision saddle mounted mass
filter is available as an option on our
range of instruments. It is easily
de-mounted for cleaning. This enclosed
filter offers improved sensitivity,
resolution and abundance sensitivity.
Dual & Triple
filters. These
are available based on saddle mounted
mass filters, and are normally chosen
for special applications or when the
highest performance/resolution is
required.. Available on the AX800
instrument only.
Detector Options.
Faraday Only. A
Faraday plate detector for ion
collection. Used mainly for higher
pressure applications when greater ion
currents are available for collection.
Dual
Faraday/Channeltron. The
Channeltron (SEM) provides a high level
of amplification of the ion beam and
therefore provides detection of much
lower ion currents. When in SEM mode the
pre-amplifier can be operated at a lower
gain and faster scanning speeds are
possible.
Discreet
SEM. A
discreet dynode Electron multiplier is
available on the AX800 as an alternative
to the Channeltron Electron Multiplier.
This has much larger surface area of
secondary electron electrodes and
therefore offers much longer life when
operating on continuous high signal
levels over prolonged periods of time.
The Faraday option is not available when
this device is fitted.
Pulse Counting. Provides
the ultimate in detection by counting
individual ions arriving at the
detector.. Normally used in trace gas
analysis applications where the lowest
level of detection is required. A
special version of the electronics is
available that includes a counting
pre-amplifier, system clock, counter,
and interface for transferring the
accumulated ion count to the quadrupole
software for display. (Special order)
High Temperature Operation
Thermal
Extender. Allows
operation of the quadrupole whilst the
analyser is at high temperature This
option is available on most of our RGA
instruments and has to be fitted to the
analyser at the time of manufacture. It
extends the back of the analyser by
approx 24 cms so the plug-on electronics
is now separated from the analyser hot
zone.
Filament Options
Technical
Notes.
Which
Filament?
The majority of our
competitors use a twin filament
assembly. That means that when one of
the filaments blows the customer has a
difficult decision. Does he replace the
filament assembly throwing the remaining
good filament away, or does he run on
the second filament and hope it does not
blow during a critical measurement when
there is no back-up.
All ASI/Larimax
RGA’s are fitted with two filaments. The
filaments are individually replaceable.
Therefore if one filament blows, that
filament can be changed at a convenient
time. And the other good filament
remains on the analyser
|
Tungsten Filaments. |
Advantages |
Disadvantages |
|
Operating temperature for Pure
Tungsten approx 2200C |
A
good low cost general purpose
filament. |
Life is reduced in oxidising
atmospheres above 5x 10e-6mBar |
|
Operating temperature for
Thoriated Tungsten (1% Thoria)
approx 1950C |
Under high vacuum, below
10e-6mBar filaments will last
many months and sometimes many
years. |
Life is reduced in high partial
pressures of water vapour
(10e-5mBar) due to filament
erosion. |
|
|
Can
be used at high pressure in
inert atmospheres. |
Tungsten filaments usually
produce background peaks at mass
28 (CO) and 44(CO2). |
|
|
Can
be used in Hydrogen or reducing
atmospheres. |
Sudden exposure to high pressure
above 10-2mBar of oxidising
atmosphere can cause instant
oxidation and burn out of
filament. |
|
|
Safe to handle filaments. |
Will burn out instantly if
switched on at atmospheric
pressure. |
|
|
|
Can
produce a catalytic action with
some chemicals. |
Comments:-
Slow evaporation of filament
will cause the filament to
become thinner over a very long
period of time, with a reduction
of operating current eventually
leading to failure.
Normally recommended in medium
and high vacuum systems for
general-purpose residual gas
analysis. |
|
Thoria Coated
Iridium. |
Advantages |
Disadvantages |
|
|
Life typically 12 months or
more. |
More expensive than tungsten
filaments. |
|
Operating
temperature approx 1400C. |
Runs at lower temperature and
therefore lower out gassing from
Ion Source. |
Poisonous and mildly
Radio-Active. Disposable gloves
and mask should be worn when
handling filaments. |
|
|
Does not produce CO or CO2 and
therefore these background peaks
are much lower. |
High levels of hydrogen can
cause reduction of the oxide
coating with an increase in
water background, and a
consequent reduction in filament
life. |
|
|
Can be used at high pressures in
oxidising atmospheres. |
Severe Shock or vibration can
dislodge the coating. |
|
|
Will tolerate high pressure
burst. |
Cannot be chemically cleaned. |
Comments:-
Normally recommended for gas
analysis applications and for
use at high operating pressures,
especially if oxidising gases
are present. Also may be
preferred in UHV conditions when
the lowest possible background
is important. |
|
Yttria Coated
Iridium. |
Advantages |
Disadvantages |
|
Operating temperature approx
1600C. |
Similar to Thoria |
Similar to Thoria (See Comment
below) |
Comments:-
Sometimes chosen as an
alternative to Thoria because it
is not Radio-active
Yttrium Oxide absorbs CO2 and
NH3 ( if present) from the
atmosphere. Long term exposure
may convert the oxide to the
carbonate. If this happens then
it may outgas large amounts of
CO2. when first operated, as the
carbonate is converted back to
the oxide. Yttria filaments
should be stored & systems
vented with dry nitrogen or an
inert atmosphere if possible, if
prolonged exposure to
atmospheric pressure is
required. |
Filaments
in other materials are available to
special order.
|
|
|
|
|
|
THE
NIBTRON ION SOURCE. (SUPPRESSED
BACKGROUND)
A major breakthrough in
quadrupole mass spectrometry has
been achieved by ASI with the
introduction of the NIBTRON ion
source. This Ion Source is
available as an option, on the
ASI quadrupole gas analysis
systems and provides the
following advantages and unique
features:-
1) Elimination of 99.9% or
more of the interfering
background peaks.
2) Provides greatly improved
accuracy and performance.
3) Allows much simpler, lower
pumping speeds, and hence much
lower cost vacuum systems.
4) Eliminates the need for
bake-out ovens.
5) Allows much smaller gas
samples to be measured.
6) Reduces memory effects
from previous gas samples
7) Eliminates catalytic
reactions from the hot filament
being measured.
8) CO and CO2 from tungsten
filament eliminated.
9) Sample gas measurement not
affected by variations in
pumping speed, or gas
discrimination.
Portable Mass Spectrometer
systems
Both the AX200 and AX600 mass
spectrometers are small low
power (16W/20W) mass
spectrometers. When fitted with
the NIBtron Ion Source they are
ideal for portable battery
powered gas analysis systems
using small ion pumps. The gas
load on the pump is 10 times
lower than a conventional ion
source to produce the same
signal current. The sample gas
can be can be further reduced
because of the absence of
background peaks. Therefore the
total gas load on the pump can
be reduced by a factor of 100 or
more. This light gas load on Ion
pumps greatly reduce problems of
argon instability, the
possibility of stalling the ion
pump and reduces the power
requirements of the pumping
system.
CONVENTIONAL ION SOURCES.
Ionise both the sample gas and
the residual gases present in
the vacuum system. These
residual background peaks often
make gas analysis very
difficult. To reduce these
background peaks to acceptable
levels it is essential to
frequently bake the vacuum
system to high temperature. Even
after bake out, residual peaks
are still present, limiting the
accuracy to which gas analysis
can be achieved. These residual
peaks will subsequently increase
in amplitude when sample gas is
introduced into the vacuum
chamber due to desoption from
the chamber walls, making it
difficult to determine the
percentage of sample peak that
may be present in a changing
background.
NIBTRON.
The new NIBTRON quadrupole
analyser has an extremely low
sensitivity to residual gas
ions, whilst at the same time
has a high sensitivity to sample
gas ions introduced via the
inlet probe. This improvement in
ionisation ratio is in excess of
2000, producing clean sample gas
spectra even under poor
vacuum/high background
conditions.
This is illustrated below. The
following two scans were made
using a two small ASI RGA mass
spectrometers. One fitted with a
standard electron impact source
and the second with a NIBTRON
source. They were operated
together on the same vacuum
system under identical vacuum
conditions and cover the mass
range from approx. 32-50amu. The
test were deliberately carried
out on a oil contaminated
vacuum chamber to produce a very
high background of residual
gases . The system pressure was
at 3 x 10-6 mBar. A leak valve
was then opened, admitting an
air sample, increasing the
pressure by 1 x 10-6mBar.
|
CONVENTIONAL SOURCE.
The background pressure
is 3x10e-6 mBar and the
air sample pressure is
1x10e-6 mBar. The very
high level of background
peaks make it difficult
to measure the argon or
CO2 peaks from an Air
sample. The mass 40 peak
is mainly background and
the CO2 peak at mass 44
is completely masked by
the high background of
CO2 produced mainly from
the filament.
|
> |
 |
|
NIBTRON ION SOURCE.
The same background
conditions as above. The
background pressure is 3
x 10e-6 mBar and the air
sample pressure is
1x10e-6 mBar.
NOTE.- the complete
absence of residual
background peaks
Masses 32, = O2
approx 150 x FSD
Mases 33,
34=Atmosheric oxygen
isotopes.
Mass 40= Atmosheric
Argon. 10xFSD
Mass 44 Atmosheric CO2.
Approx 330ppm.
Note.- The higher sample
peak heights are due to
the high sensitivity of
the NIBTRON Source.
|
> |
 |
NOTE 1:- Because of its very low
sensitivity to residual
background gases, the NIBTRON is
totally unsuitable for fitting
to existing vacuum systems for
Residual Gas Analysis
Applications. It will only
analyse gases introduced via the
NIBTRON gas inlet probe.
NOTE 2:- The
NIBTRON ION SOURCE is unique to
Anglo Scientific Instruments and
should not be confused with a
technique used by other
manufactures whereby a
background spectra is sampled
and stored. Gas is introduced
and then the stored background
is subtracted from the sample +
background spectra. This
technique has limited use
because the background spectra
is frequently changing with time
and the introduction of the
sample gas will cause further
changes in the background gases
due to adsorbtion and /or
desorbtion of gases from the
chamber walls caused by pressure
changes within the vacuum
chamber. Because the background
is now different to the stored
background The result can give
rise to large errors
particularly on smaller peaks.
Some peaks may be present that
do not exist and others that
should be present are not shown.
The result of some peaks
indicate a negative result..
The NIBTRON ion source is a
vastly superior technique
completely free of these errors |
|
|
|
|
|
|
|
Vacuum
Systems and Complete Gas Analysis
Systems.
The COMPASS concept is to provide
complete solutions to gas analysis
problems. With a wide choice of inlet
systems, vacuum systems, ion sources and
flexible software, Compass can be easily
configured to your application.
Key Benefits
 |
Fully Enclosed |
 |
Choice of pumping configurations |
 |
Fully interlocked, |
Mass Spectrometers by their very
nature require a high vacuum environment
to operate. This is provided by a High
Vacuum System. Gas that requires
analysis is then leaked into the high
vacuum system at a controlled rate by
the Inlet System. There is no such thing
as a perfect vacuum. Residual Gases are
always present. These residual gases may
interfere with the gases that require
measurement therefore it is important
that these residual gases are kept to a
minimum. The better the vacuum the lower
the residual gases.
The
Main High Vacuum System.
Most ASI mass
spectrometers are small and therefore
only require a small vacuum housing. The
amount of gas required for analysis that
will be leaked into the quadrupole Ion
Source is also very small, therefore
for the majority of gas analysis
applications the main high vacuum pump
can be satisfied by a small
turbo-molecular pump. A small rotary
vane pump will provide the low backing
pressure for the turbo-pump.
Therefore a
typical high vacuum system will normally
contain the following items.
1. Fully enclosed
Cabinet (Floor standing or Bench Top)
with Fan cooling.
2. Mass
Spectrometer housing with ports for
inlet system and high vacuum gauge.
3. Turbo-molecular
pump with splinter shield..
4. 2 Stage Rotary
Vane Pump, with Fore-line trap and Oil
Mist Filter. (Backing pump for turbo).
5. Anti-vibration
mountings for the pumps.
6. Main switch
panel and fuses.
The
following additional items form a
Complete Gas Analysis System.
7. 2 Stage Rotary
Vane Pump, with Fore-line trap and Oil
Mist Filter. (for inlet system).
8. Inlet system.
9. Fitting of High
and low vacuum gauges. with power supply
.
10. Mass
Spectrometer, control electronics and
power supply.
11. Additional
wiring to provide interlocking between
the pumps gauges and mass spectrometer
for 'Fail Safe Operation'.
Compass vacuum
systems are configured for each
application.
INLET SYSTEMS
In order to interface the low
pressure requirement of the mass
spectrometer to the environment of the
'real-world' and hence cater for a wide
range of analyses, Compass includes a
choice of inlet systems from simple leak
valves to computer controlled
multi-stream gas samplers. Many inlet
systems are specifically designed to
meet particular requirements.
Further information on choice of inlet
systems.
VACUUM SYSTEM
 |
Compass vacuum systems are
configured for each application.
The selection of turbo-molecular
pump, Backing pump and
control/monitoring equipment is
made easier by relying on the
wealth of experience of Larimax
vacuum engineers. High and Low
vacuum gauges are normally
fitted as standard to provide
system interlocking for Fail
Safe operation. |
 |
|
< Floor Standing System.
Complete gas analysis system in
fully enclosed mobile cabinet. |
|
^
Compact Bench-Top System. Complete
with High Vacuum system,
Capillary inlet for atmospheric
sampling, Quadrupole and
electronics |
|
|
|
|
|
|
|
|
Quadrupole Mass Spectrometers,
because of their nature, require
an operating vacuum of 10-4 mBar
or better. However most
processes which need monitoring
occur at a pressure in excess of
10-4 mBar. It is necessary
therefore to have some form of
interface between the mass
spectrometer and the process
vessel. These interfaces are
called Inlet Systems and the
type required is dependent upon
the application.
|
|
Capillary
Inlet
This system is a form of
continuous gas sampling, and may
be used across a pressure range
of 10-4 mBar to atmospheric
pressure (1000 mBar). It
consists of a narrow tube which
connects the sampling point to
the mass spectrometer vacuum
system. The length and internal
diameter of the tube have to be
selected according to the
pressure at which the sample is
taken.
|
 |
|
The
disadvantage of this system is
that at higher sampling
pressures ( above 100 mBar) the
response time becomes very long
( of the order of a few minutes
) due to the length of the tube.
This can be overcome by a bypass
type inlet system.
|
|
Capillary
Inlet with bypass
This type
of inlet system is better suited
to sampling over a pressure
range from 100 mBar to
atmospheric pressure. The
operating principle is that a
capillary tube is connected to a
T-piece which is attached to a
rotary pump. To the third arm is
fitted a molecular flow leak or
leak valve. Gas is drawn along
the capillary by the rotary pump
and a small portion of the gas
which flows through the T-piece,
passes across the leak and into
the mass spectrometer.
|
 |
|
This inlet
requires a gas flow of
approximately 20 ml min and
achieves a response time of
better than 100 ms. Capillary
inlets are also available with a
heater, which improves response
time, and with an auxiliary pump
to draw the sample through the
bypass line. A crimp at the
sample end to restrict the
sample gas flow and a throttle
valve on the bypass pump will
allow much smaller sampling
rates and maintain good responce
times.
|
|
Leak Valve
Inlets
A good,
continuous sampling, leak valve
can provide the flexibility to
sample across a range of 10-5
torr to well above atmospheric
pressure. The operating
principle is the precise control
of a knife edge biting into a
surface. The knife edge position
is controlled by a fine screw
operating mechanism with a
calibrated dial so that a
particular leak rate may be
reproducibly set. The main
disadvantage of this method of
gas sampling is that
fractionation of the gas occurs
across the valve seat and the
degree of fractionation depends
on the leak rate setting. It
therefore makes calibration of
this inlet difficult. Response
times when sampling from higher
pressures may also be long
unless attention is paid to
producing a continuous gas flow
across the valve seat. The inlet
is available either as a general
purpose, polymer sealed valve or
as an all metal precision valve.
|
|
Membrane
Inlets
A
membrane system consists of a
tube terminating in a special
semi-permeable membrane
stretched over a grid.
The
application and the components
of interest in the sample
determine the type of membrane
selected, as the membrane can
exert considerable selectivity.
Perhaps the most common types of
membrane material employed are
Teflon and silicone rubbers.
Teflon is used where gases are
to be monitored in the absence
of solutes and where water is in
high abundance.
|
 |
|
Silicone
is highly permeable to oxygen
and can be used for the
monitoring of organic compounds
in situ. The major application
of this inlet is in sample
enrichment, particularly of
organic materials, where the low
levels would fall below the
normal detection limit of the
mass spectrometer. Enrichments
by a factor of 200 are possible
giving detection levels down to
the low ppb.
|
|
Batch
Inlet
Continuous sampling techniques
are satisfactory provided the
mass spectrometer can be sited
close to the sampling point. As
this is not always possible a
sample must be collected in a
suitable vessel and transferred
to the mass spectrometer.
Introducing the gas into a
vacuum system requires a batch
inlet
Batch
inlets can be specially designed
to meet particular applications
but they generally consist of a
reservoir that is connected by
valves to a vacuum system.
|
 |
|
The sample
can be introduced through a
septum port (if the sample is in
a gas syringe) or through a
valve port (if contained in a
glass or metal collection
flask). Options
might include the ability to
purge the reservoir with inert
gas or heat the chamber to
reduce background levels between
samples (especially useful if
water is being measured).
Another useful option is the
addition of a pressure gauge.
|
|
Dual inlets.
Dual Inlets consist
of a high conductance isolation
valve, and a leak valve placed
in parallel across a single
inlet line. The wide range in
the respective conductance's
means that this single system
can sample from atmospheric
pressure to high vacuum. This
capability is particularly
useful in applications such as
sputtering where the pressures
can alter dramatically during
different stages in the process. |
 |
|
MULTI_STREAM
GAS SAMPLING.
The
instruments are not expensive
but we still accept that most
users would prefer to introduce
multiple samples into one mass
spectrometer rather than buy a
mass analyser for each sample
stream. The multi stream gas
sampling inlet allows the
connection of up to 32 gas
streams to one capillary inlet.
Which is then used to introduce
each selected sample into the
source of the analyser.
All
streams not being sampled flow
through their own individual
inlet and outlet connections.
Both the operation of electrical
switching to select the channel
(which can be one or more
calibration gases) and
determination of dwell time per
channel can be under computer
control. This inlet is very
versatile but a typical
application is for the sampling
of dissolved gases (see membrane
inlet) and off gases from
multi-vessel fermentation and
cell culture installations.
|
|
Solids Probe.
Analysis of solids that can be
attached to a small cup at the
probe tip. A built in heater at
the probe tip heats the sample
to slowly evaporate the sample.
The probe usually is inserted
into the vacuum chamber via a
vacuum lock. The higher
temperature probes are normally
water cooled. This probe is used
in conjunction with a cross beam
Ion Source. |
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